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Photodetectors Explained | Photonics

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TECHNOLOGY EXPLAINER

Photodetectors
— turning light back into electricity is a matter of thinness and dark current

A signal sent as light is finally turned back into electricity by a photodetector (photodiode). At optical fibre wavelengths, the light is received by InGaAs on an InP substrate or by Ge grown on silicon. For speed you want the absorption layer thin; for sensitivity you want it thick. And the dark current that flows even without light is set by crystal defects and interfaces.

Built from primary sources: Hamamatsu Photonics technical material, the Mitsubishi Electric Technical Report and news releases, imec, a Nature Communications paper, a paper on Ge/Si photodetectors, and published material from Sumitomo Electric Industries and OpenLight / Last updated September 2026

Conceptual image of a small square crystal chip on a dark surface, with a small smooth round window at its centre reflecting soft light
Conceptual image (AI-generated). An impression of a chip with a small window that receives light. It does not show the real dimensions, shape or colour of a photodetector, or any company's product.
What this article covers
  1. Photodetectors in three points
  2. Which wavelengths can be received is set by the bandgap
  3. The speed limit — the trade-off between capacitance and transit time
  4. A company example: a back-illuminated InGaAs PD for 200 Gbps
  5. A materials engineer's view (1): dark current is set by crystal and interface
  6. Ge photodetectors on silicon
  7. A materials engineer's view (2): putting thermal expansion mismatch to work
  8. APDs — amplification by avalanche
  9. What is still hard
  10. Glossary / References / Claim-to-source audit
How claims are labelled in this article

Sourced = stated in published material or a peer-reviewed paper (link given)
Our calculation = a figure this article derived, with the assumptions spelled out
Not yet confirmed = a plan or research-stage result with no confirmed production record
Structural readings and materials-design interpretations are marked separately as Commentary. Performance figures are kept apart as company technical material and evaluation results for development parts or values from papers.

1. Photodetectors in three points

A photodetector (photodiode, PD) shines light on a semiconductor pn (or pin) junction and collects the electrons and holes created by absorbed photons as a current. Hamamatsu Photonics' technical material describes the InGaAs PIN photodiode as a photovoltaic device with a PN junction, just like a Si photodiodeSourced.

  • What it is made of: at optical fibre wavelengths, InGaAs lattice-matched to InP, or in silicon photonic circuits selectively grown GeSourced
  • What makes it hard: speed (bandwidth), sensitivity (A/W) and dark current (current with no light) pull against one another. Hamamatsu Photonics explains that the cutoff frequency set by capacitance and the one set by transit time trade off against each otherSourced
  • Detectors that amplify: there are also avalanche photodiodes (APDs), which multiply the current internallySourced
Where this sits in the series

Where Ge detectors fit within a silicon photonic circuit (one of its four components) was covered in our explainer on silicon photonics, InP substrates and integration on InP in our explainer on photonic integrated circuits and indium phosphide, and the EML on the transmit side in our explainer on semiconductor lasers. The amplifier circuit behind the detector (TIA) and signal processing are covered in our explainers on optical interconnects and SerDes and on coherent optical communication and DSP. This article focuses on the crystal, layer structure and dark current of the detector.

2. Which wavelengths can be received is set by the bandgap

A semiconductor absorbs only light with more energy than its bandgap. Hamamatsu Photonics' technical material gives the relation between bandgap Eg (eV) and cutoff wavelength λc (µm) as λc = 1.24 ÷ Eg, and explains that InGaAs with a composition lattice-matched to InP has a bandgap of 0.73 eV at room temperature and a cutoff wavelength of about 1.7 µmSourced. The bandgap of InGaAs also shifts with the In-to-Ga ratio, and the company offers long-wavelength types with cutoffs of 1.9, 2.1 and 2.6 µm alongside the standard 1.7 µm typeSourced.

How far into the infrared InGaAs can detect (includes our calculation) Horizontal axis = wavelength (µm). λc = 1.24 ÷ Eg sets the long-wavelength limit 0.8 1.1 1.31 1.55 1.7 2.0 µm Range InGaAs can absorb (lattice-matched to InP, Eg = 0.73 eV) Passes straight through Around the O band Around the C band 1.24 ÷ 0.73 ≈ 1.70 µm Note: λc = 1.24 ÷ Eg, and Eg = 0.73 eV (room temp.) with a cutoff near 1.7 µm for InGaAs, are from Hamamatsu's technical note. Note: 1.24 ÷ 0.73 ≈ 1.70 is our check. Short-wavelength response is set separately by structure (e.g. InP window absorption). Note: the 1.31 µm and 1.55 µm marks are indicative; band definitions are not covered in this article. Note: the scale is proportional, at 1 µm = 500 px.
Fig. 1 Drawing that includes our calculation (vector drawing). The cutoff wavelength formula and the InGaAs values follow Hamamatsu Photonics' technical material [Reference 1]. The 1.70 µm check and the way the figure is drawn are this article's own.

Silicon detectors barely absorb near-infrared communication wavelengths (see our explainer on silicon photonics), so silicon photonic circuits use Ge instead. Yang and colleagues (2010), writing on Ge/Si photodetectors, note that Ge is regarded as an ideal candidate for low-cost, high-performance infrared detectors because it has a large absorption coefficient for near-infrared light at 1,300 to 1,550 nm and is compatible with existing silicon processingSourced.

3. The speed limit — the trade-off between capacitance and transit time

Hamamatsu Photonics' technical material sets out, as equations, the factors that determine a detector's response speedSourced.

  • Capacitance (CR time constant): cutoff frequency fc = 1 ÷ (2π Ct RL). The terminal capacitance Ct is proportional to the active area and inversely proportional to the square root of the reverse voltage. For low capacitance, a small active area and a thick depletion layer are better
  • Transit time (drift time): the time for carriers to cross a depletion layer of thickness W is trd = W ÷ vds, and the cutoff frequency it sets is fc(trd) = 0.44 ÷ trd. Here a thin depletion layer is better
  • Carrier speed: in InGaAs, the hole drift velocity saturates at a field of about 10⁴ V/cm, at about 5×10⁶ cm/s
  • Diffusion delay: charge created by light absorbed outside the junction can take several microseconds or more to diffuse to the electrode
Our calculation: absorption (depletion) layer thickness and the bandwidth set by transit time

Assumptions: vds = 5×10⁶ cm/s (from Hamamatsu Photonics), fc = 0.44 ÷ trdOur calculation

  • W = 1 µm → trd = 20 ps → about 22 GHz
  • W = 0.5 µm → 10 ps → about 44 GHz
  • W = 0.3 µm → 6 ps → about 73 GHz
  • W = 0.2 µm → 4 ps → about 110 GHz

Assumptions and limits: this simply applies to the whole depletion layer the equation and hole saturation velocity Hamamatsu Photonics gives in its explanation of APDs. Electron velocity, capacitance, electrodes and packaging are not included. It is a calculation to show the trend, not the bandwidth of any particular device.

Thinner is faster: bandwidth set by transit time (our calculation) Bar length = cutoff frequency set by transit time (10 GHz = 4 px) 1 µm thick about 22 GHz 0.5 µm thick about 44 GHz 0.3 µm thick about 73 GHz 0.2 µm thick about 110 GHz But a thinner layer absorbs less of the light, lowering sensitivity, and raises capacitance Note: hole saturation velocity (~5×10⁶ cm/s) and f = 0.44 ÷ t are from Hamamatsu. Example thicknesses and bandwidths are ours. Note: capacitance, electrodes and electron transit are not included. Not the bandwidth of any particular device.
Fig. 2 Drawing that includes our calculation (vector drawing). The equations and saturation velocity follow Hamamatsu Photonics' technical material [Reference 1], and the point that a thinner layer loses sensitivity follows the Mitsubishi Electric Technical Report [Reference 2]. The example thicknesses and each bandwidth are calculated by this article and are not published values.

4. A company example: a back-illuminated InGaAs PD for 200 Gbps

On 20 August 2024 Mitsubishi Electric announced that it would begin sample shipments of a “200 Gbps pin-PD chip for 800 Gbps / 1.6 Tbps optical fibre communications” on 1 OctoberSourced. The company said it had been in volume production of a 200 Gbps EML chip for transmission since April 2024, and that on the receive side there had been a problem of few products meeting the required performanceSourced. Its 2025 Technical Report describes the design in detailSourced.

  • The problem: multi-lane optical transceivers want a large receiving area to ease optical alignment, but enlarging the receiving area of a surface-illuminated device enlarges the pn junction, raising capacitance and lowering speed. A conventional back-illuminated device (receiving area φ15 µm) struggles to exceed 50 GHz of bandwidth. Thinning the absorption layer for bandwidth means the sensitivity falls short of 0.60 A/W
  • The solution: a back-illuminated design that brings light in from the substrate side, keeping the pn junction (formed by selective Zn diffusion, about 10 µm across) small while shaping the InP substrate itself into a convex lens to enlarge the effective receiving area. The anode electrode doubles as a metal mirror, reflecting light that has passed through the absorption layer so that it is absorbed on a second pass
  • The crystal: on a semi-insulating Fe-doped InP substrate, an n-type contact layer, n-type InP layer, undoped InP layer, absorption layer, undoped InP window layer and p-type contact layer are grown epitaxially in that order. The layers outside the receiving area are etched away, and Fe-doped InP is regrown to bury them and protect the interfaces
Back-illuminated PD cross-section (conceptual, after the Mitsubishi Electric report) Light enters from below (substrate side), reflects off the metal mirror on top and crosses the absorption layer again Anode electrode (also acts as a metal mirror) Light (from the substrate side) Semi-insulating Fe-doped InP substrate Substrate shaped into a convex lens Fe-InP regrowth Fe-InP regrowth p-type (Zn diffused, ~10 µm across) Undoped InP window layer Absorption layer (InGaAs) Undoped InP layer n-type InP and n-contact layers Note: layer order and materials follow the Mitsubishi Electric report. Thickness, width and lens shape are schematic, not real dimensions.
Fig. 3 Conceptual diagram (vector drawing). The layer structure, selective Zn diffusion (about 10 µm across), buried regrowth of Fe-doped InP, the substrate shaped into a convex lens and the anode electrode doubling as a metal mirror follow the Mitsubishi Electric Technical Report [Reference 2]. That the absorption layer is InGaAs is also stated in the report. Layer thicknesses, widths and colours are this article's schematic.
ItemMitsubishi Electric evaluation results (development part)
Dark currentabout 1 pA at the operating voltage of 2 V (room temperature, five devices)
Activation energy of dark currentabout 0.66 eV (nearly equal to the bandgap of the InGaAs absorption layer → diffusion current dominates)
Responsivityabout 0.60 A/W
3 dB bandwidthabout 65 GHz (2 V, 1,310 nm, 0 dBm, probed directly on the chip)
Responsivity toleranceabout φ10 µm without the lens → about φ40 µm with it

Sourced (Mitsubishi Electric Technical Report Vol. 99 No. 3, 2025 [Reference 2]). These are evaluation results for the chip alone, not the receiver sensitivity of a transceiver.

Our calculation: what fraction of photons does 0.60 A/W turn into electrons?

Quantum efficiency η = responsivity (A/W) × 1.24 ÷ wavelength (µm)Our calculation

  • 0.60 × 1.24 ÷ 1.31 ≈ 0.57 (about 57% of incoming photons become current)
  • Optical alignment tolerance: φ10 µm → φ40 µm is 16 times in area ((40 ÷ 10)²)

Assumptions and limits: this treats the 0.60 A/W responsivity as a value at 1.31 µm. The report measured the two-dimensional distribution at 1,310 nm, but does not state the wavelength at which responsivity was measured, so this is an indicative calculation.

5. A materials engineer's view (1): dark current is set by crystal and interface

Why this matters for materials engineers: what “activation energy ≈ bandgap” tells you

The most interesting part of the Mitsubishi Electric report from a materials standpoint is how it reads the temperature dependence of the dark currentSourced.

  • The activation energy obtained from the temperature dependence of dark current is about 0.66 eV, nearly equal to the bandgap of the InGaAs absorption layer
  • That means the dark current is dominated by diffusion current in the InGaAs absorption layer, with generation-recombination and leakage currents small
  • This suggests little dark current flowing via defects in the epitaxial layers or on the sides of the junction
  • The company attributes this to selective Zn diffusion and a semiconductor-buried structure using Fe-doped InP, which suppress the formation of interface states and reduce leakage along the sides of the pn junction

Hamamatsu Photonics' technical material likewise divides APD dark current into surface leakage current flowing along the interface between the PN junction and the surface passivation film, and the like, and recombination current, tunnelling current, diffusion current and the like generated inside the semiconductorSourced.

Translated into materials terms (our framing):

  • Diffusion current: the floor set by the material's bandgap. Unavoidable
  • Generation-recombination current: created by defects (deep levels) in the crystal. Set by epitaxial quality
  • Surface and sidewall leakage: set where the junction meets the surface, and by the interface with the passivation film

An activation energy close to the bandgap is therefore also a “certificate of quality”: the latter two — crystal defects and interfaces — have been suppressed enough that the device has reached the limit of the material's physics. The choice to fill the etched sidewalls with the same InP crystal rather than an insulating film reflects a design philosophy that avoids interfaces (our commentary).

Our calculation: how many times does dark current grow when the temperature rises by 60 °C?

Assumptions: dark current ∝ exp(−Ea ÷ kT), Ea = 0.66 eV (Mitsubishi Electric's estimate), k = 8.617×10⁻⁵ eV/KOur calculation

  • 25 °C (298 K) → 70 °C (343 K): exp[0.66 ÷ k × (1/298 − 1/343)] ≈ about 29 times
  • 25 °C (298 K) → 85 °C (358 K): likewise ≈ about 74 times
  • For a device at 1 pA at room temperature, that is about 74 pA at 85 °C

Assumptions and limits: a simplification assuming diffusion current dominates and the activation energy stays constant. 70 °C and 85 °C are temperatures chosen by this article, not guaranteed product temperatures. Hamamatsu Photonics also notes that dark current rises exponentially with temperature, with a coefficient that depends on the device's bandgap and reverse voltageSourced.

Dark current growth with temperature at Ea = 0.66 eV (our calculation) Ratio relative to 25 °C = 1. Log horizontal axis (each tick is a factor of 10) 1 10 100 25 °C 1× (e.g. 1 pA) 70 °C about 29× 85 °C about 74× Note: Ea ≈ 0.66 eV is Mitsubishi Electric's estimate; the ratios are ours (diffusion current dominant, constant Ea assumed). Note: not guaranteed values for any product. Bar lengths are indicative on the log scale.
Fig. 4 Drawing that includes our calculation (vector drawing). The activation energy of about 0.66 eV, and the interpretation that dark current is dominated by diffusion current in InGaAs, follow the Mitsubishi Electric Technical Report [Reference 2]. The 70 °C and 85 °C conditions and the factors of about 29 and about 74 are calculated by this article and are not published values.

6. Ge photodetectors on silicon

In silicon photonic circuits, detectors are made of Ge. imec explained in 2018 that its silicon photonics prototyping platform uses 200 mm SOI wafers and integrates Ge photodetectors and other devices through selective-area growth of Ge and standard CMOS metallisation, and that its modulators and photodetectors have electro-optic bandwidths above 50 GHzSourced. Shekhar and colleagues' 2024 Nature Communications paper states that Ge photodetectors are already offered by many commercial silicon photonics foundriesSourced.

Conceptual image, seen from a low angle, of a single small dark grey crystal island with smooth edges rising from a flat, pale grey surface
Fig. 5 Conceptual image (AI-generated). An impression of growing Ge only in chosen places on silicon (selective growth). It does not show the real shape, dimensions or colour of a Ge photodetector, or any company's structure.
A photodetector with Ge grown on a silicon waveguide (conceptual cross-section) blue = silicon / grey = oxide / dark grey = Ge / × = threading dislocations near the interface (schematic) Light (from the Si waveguide) Ge Si waveguide layer Buried oxide Si substrate Selectively grown Ge The lattice mismatch (about 4%) introduces dislocations from the interface Note: selective Ge growth follows imec; the ~4% lattice mismatch and its link to dislocations and dark current follow Yang et al. Note: shape, dimensions, omitted electrodes and the way dislocations are drawn are schematic, not a real structure.
Fig. 6 Conceptual diagram (vector drawing). Selective growth of Ge follows imec [Reference 3], and the roughly 4% lattice mismatch between Ge and Si as a cause of threading dislocations and dark current follows Yang et al. [Reference 5]. The arrangement bringing light in sideways from the waveguide, the shape and dimensions, and the way dislocations are drawn are this article's schematic. Electrodes and doped regions are omitted.

Yang and colleagues (2010) note that the lattice constant of Ge is 4% larger than that of Si, which can produce a high density of threading dislocations in relaxed Ge layers, leading to high dark current and difficult process integrationSourced. The paper shows by simulation that lowering the threading dislocation density in the Ge layer greatly reduces the dark currentSourced.

7. A materials engineer's view (2): putting thermal expansion mismatch to work

Why this matters for materials engineers: strain locked in on cooling extends the wavelengths that can be received

Yang and colleagues describe one more materials effectSourced.

  • Experiments have confirmed that Ge grown epitaxially on Si carries tensile strain
  • The strain arises from the difference in thermal expansion between Ge and Si as the layer cools from the high growth temperature
  • It depends on growth temperature and is expected to reach at most 0.34% when cooled from the melting point of Ge (937 °C)
  • Tensile strain narrows the direct bandgap of Ge and has been proposed as a way to extend detection to longer wavelengths (the L band)

Thermal expansion mismatch is normally a nuisance that causes warpage and delamination. Here it works as a function that extends the wavelengths the detector can receive. The same Ge-on-Si interface produces dislocations (a cause of dark current) through the lattice mismatch and useful strain through the thermal expansion mismatch — a bad effect and a good effect living together at one heterointerface (our commentary).

Our calculation: a strain of 0.34% corresponds to an extension of 3.4 µm per millimetre of lengthOur calculation. It looks small, but the premise of the paper's argument is that it is enough to move the band structure.

8. APDs — amplification by avalanche

According to Hamamatsu Photonics' technical material, an APD (avalanche photodiode) multiplies the photocurrent internally through avalanche multiplication, in which carriers accelerated by a strong reverse voltage collide with the crystal lattice and create new electron-hole pairsSourced.

SAM InGaAs APD: separate layers for absorbing and for multiplying (conceptual) P⁺ InP avalanche layer (multiplication) InGaAsP layer InGaAs absorption layer InP substrate (N⁺) Light holes move up Multiplied here InP: holes ionise more readily (k > 1) Absorbed here InGaAs has a small Eg, so under a high field its dark current becomes large Note: layer structure and roles follow Hamamatsu Photonics. Thicknesses, light direction and guard ring are simplified schematics.
Fig. 7 Conceptual diagram (vector drawing). The SAM structure separating an InGaAs absorption layer from an InP avalanche layer, the reason a high reverse voltage on InGaAs produces large dark current, and the larger ionisation rate for holes in InP (k > 1) follow Hamamatsu Photonics' technical material [Reference 1]. Details of layer thickness and placement are this article's schematic.
  • Division of roles (SAM structure): InGaAs has a small bandgap, so a large reverse voltage produces large dark current. The structure therefore separates an InGaAs layer that absorbs light from an InP layer that multipliesSourced
  • A material constant sets the noise: the ratio k of the ionisation rates of electrons and holes is a physical constant intrinsic to the semiconductor material, and in InP holes ionise more readily (k > 1). Holes generated in the InGaAs are therefore sent into the InP layer to be multiplied. Multiplication comes with statistical fluctuation (excess noise); approximating the excess noise factor as F ≈ Mx, the company's example gives x ≈ 0.7Sourced
  • Temperature: as temperature rises, lattice vibration intensifies and carriers are more likely to collide with the lattice before reaching the energy needed for ionisation, so the gain at a given voltage falls. The voltage has to be adjusted or the temperature held constantSourced
  • There is an optimum: raising the gain raises both signal and noise, so there is a gain at which S/N is maximisedSourced
Our calculation: how noise grows as gain goes up

Taking F ≈ Mx with x = 0.7 (Hamamatsu Photonics' example)Our calculation,

  • M = 10 → F ≈ 100.7 ≈ 5.0
  • M = 20 → F ≈ 200.7 ≈ 8.1

Doubling the gain doubles the signal and raises the excess noise factor by about 1.6 times. That is why more gain is not always better. Assumption: the approximation is applied as it stands; these are not values for any particular product.

On APDs in silicon photonics, Shekhar and colleagues write that APDs combining bandwidth, sensitivity and low noise at low voltage help improve S/N on the receive side, but that compared with Ge photodetectors, APDs generally fall short in bandwidth, linearity and power handling, and need an optimal bias as well as stabilisation against temperature and voltage driftSourced. They also caution that raising the gain alone, while the intrinsic responsivity stays low, does not improve performanceSourced.

9. What is still hard

(1) The tug-of-war between thinness and sensitivity goes on

Mitsubishi Electric solved the problem that a thin absorption layer falls short of 0.60 A/W by sending light back and forth with a metal mirror and turning the substrate into a lensSourced. How far surface-illuminated detectors can keep up in generations with even higher per-wavelength rates could not be confirmed in the primary sources this article consultedNot yet confirmed.

(2) Dislocations and dark current in Ge-on-Si

The roughly 4% lattice mismatch between Ge and Si remains a cause of dislocations and dark currentSourced. Production values for dark current and dislocation density in each foundry's Ge photodetectors could not be confirmed in the primary sources within the scope of this article, and are not given.

(3) Reliability

OpenLight announced in March 2025 that it had completed Telcordia GR-468 qualification for active components with InP integrated on silicon, including photodetectors (PDs)Sourced (as published by the company). Mitsubishi Electric says that selective Zn diffusion and the semiconductor-buried structure can be expected to give high reliabilitySourced, but no long-term reliability test results are given within the scope of the report.

The article in summary
  • The wavelengths a detector can receive are set by its bandgap; InGaAs lattice-matched to InP (0.73 eV) reaches about 1.7 µmSourced
  • Speed is set by thinness and smallness. Looking at transit time alone, 1 µm gives about 22 GHz and 0.3 µm about 73 GHzOur calculation
  • Mitsubishi Electric's 200G PD won sensitivity from a thin absorption layer by turning the substrate into a lens and the electrode into a mirror. Quantum efficiency is about 57%Our calculation
  • A dark-current activation energy close to the bandgap is evidence that crystal defects and interface leakage have been suppressedSourced
  • In Ge-on-Si, the lattice mismatch produces dislocations while the thermal expansion mismatch produces useful tensile strainSourced

10. Glossary

Photodiode (PD)
A semiconductor device that absorbs light and passes a current.
pin photodiode
A structure with a lightly doped i layer between the p and n layers, where the light is absorbed.
InGaAs
An alloy of indium, gallium and arsenic. At the composition lattice-matched to InP it receives near-infrared light.
Cutoff wavelength
The limit beyond which longer wavelengths can no longer be absorbed. λc = 1.24 ÷ Eg.
Responsivity (A/W)
The current per watt of light. Set by quantum efficiency and wavelength.
Quantum efficiency
The fraction of incoming photons collected as electrons in the current.
Dark current
The current that flows when no light is falling on the device. A source of noise.
Activation energy
An energy obtained from the temperature dependence of dark current. A clue to which kind of current dominates.
Depletion layer
The region near the junction free of carriers. Charge created there is swept out quickly by the field.
Drift time (transit time)
The time carriers take to cross the depletion layer.
CR time constant
The product of device capacitance and load resistance. A large value slows the response.
Back-illuminated
A structure in which light enters from the side opposite the junction (the substrate side).
Selective Zn diffusion
Diffusing zinc only into chosen areas to form p-type regions.
Semiconductor-buried structure
A structure in which etched sidewalls are filled back with crystal such as Fe-doped InP.
Selective growth
Growing crystal only in chosen places on a wafer. Used for Ge photodetectors.
Threading dislocation
A line defect that runs from the interface up through the film to its surface in growth on a foreign substrate.
Tensile strain
A state in which the crystal is stretched. In Ge it narrows the bandgap.
APD
Avalanche photodiode. A detector that multiplies carriers internally.
SAM structure
An APD structure with separate absorption and multiplication layers.
Excess noise factor
How much the fluctuation of multiplication adds to noise. Approximated as F ≈ Mx.
Ionisation rate ratio k
The ratio of the rates at which electrons and holes create electron-hole pairs by collision. A constant intrinsic to the material.

11. References (primary sources)

  1. Hamamatsu Photonics “Technical note: compound semiconductor photosensors” (PDF, in Japanese) — hamamatsu.com
  2. Mitsubishi Electric S. Okuda et al., “200 Gbps EML and PD for 800 Gbps / 1.6 Tbps transmission in data centres”, Mitsubishi Electric Technical Report (Mitsubishi Denki Giho) Vol. 99 No. 3 (2025) (PDF, in Japanese) — giho.mitsubishielectric.co.jp
  3. imec “Silicon photonic interposers for 400Gb/s and beyond optical interconnects”, imec magazine, October 2018 — imec-int.com
  4. S. Shekhar, W. Bogaerts, L. Chrostowski, J. E. Bowers et al. “Roadmapping the next generation of silicon photonics”, Nature Communications 15, 751 (2024, DOI: 10.1038/s41467-024-44750-0) — nature.com
  5. J.-H. Yang, Y. Wei, X.-Y. Cai, J.-Z. Ran (Lanzhou University) “The effects of threading dislocations and tensile strain in Ge/Si photodetector”, Microelectronics International 27(2), 113–116 (2010, DOI: 10.1108/13565361011034803) (PDF) — bdt.semi.ac.cn
  6. Mitsubishi Electric “Sample shipments begin of the ‘200 Gbps pin-PD chip for 800 Gbps / 1.6 Tbps optical fibre communications’”, 20 August 2024 (in Japanese) — mitsubishielectric.co.jp
  7. OpenLight “OpenLight Achieves Successful Completion of Telcordia GR-468 Qualification for Silicon Photonics Components”, 24 March 2025 — openlightphotonics.com

12. Claim-to-source audit

Claim in the textBasisLabel
That the InGaAs PIN photodiode is a photovoltaic device with a PN junction, like a Si photodiode; λc = 1.24 ÷ Eg, with InP-lattice-matched InGaAs at Eg 0.73 eV at room temperature and a cutoff of about 1.7 µm; that the bandgap varies with composition, with long-wavelength types at 1.9, 2.1 and 2.6 µm besides the 1.7 µm standard; that Ct is proportional to active area and inversely proportional to the square root of reverse voltage, the CR cutoff 1/(2πCtRL), and that a small active area and thick depletion layer favour CR; trd = W/vds and fc(trd) = 0.44/trd, InGaAs hole drift velocity saturating at about 10⁴ V/cm at about 5×10⁶ cm/s, and the trade-off between the two; that charge absorbed outside the junction can take several microseconds or more to diffuse; that dark current rises exponentially with temperature with a coefficient depending on bandgap and reverse voltage; and the APD principle (avalanche multiplication), the reason for the SAM structure (InGaAs absorption layer and InP avalanche layer), the components of dark current (surface leakage and the like / recombination, tunnelling, diffusion and the like), that the ionisation rate ratio k is material-specific with k > 1 in InP, that holes drift into the InP layer, F ≈ M^x with x ≈ 0.7 as an example, the gain that maximises S/N, and why gain falls as temperature risesHamamatsu Photonics technical note, “Compound semiconductor photosensors”, Reference 1 https://www.hamamatsu.com/content/dam/hamamatsu-photonics/sites/documents/99_SALES_LIBRARY/ssd/compound_kird9004j.pdfSourced
That multi-lane use calls for a larger receiving area but a larger junction raises capacitance, that a conventional back-illuminated device (φ15 µm) struggles to exceed 50 GHz, and that thinning the absorption layer leaves responsivity short of 0.60 A/W; the back-illuminated design, the substrate shaped into a convex lens, and the anode electrode doubling as a metal mirror; the layer structure on an Fe-doped InP substrate, buried regrowth of Fe-doped InP, selective Zn diffusion (about 10 µm across), and suppression of interface states and leakage; dark current of about 1 pA at 2 V, an activation energy of about 0.66 eV close to the InGaAs bandgap indicating diffusion-dominated current, and the implication of little leakage via defects and junction sidewalls; responsivity tolerance from φ10 to φ40 µm, responsivity of about 0.60 A/W, and 3 dB bandwidth of about 65 GHz (with measurement conditions); and the statement that high reliability can be expectedMitsubishi Electric Technical Report Vol. 99 No. 3 (2025), Reference 2 https://www.giho.mitsubishielectric.co.jp/giho/pdf/2025/2503104.pdfSourced
That imec's silicon photonics prototyping platform uses 200 mm SOI and integrates Ge photodetectors through selective Ge growth and standard CMOS metallisation, and that its modulators and photodetectors have bandwidths above 50 GHz (2018)imec magazine (October 2018), Reference 3 https://www.imec-int.com/en/imec-magazine/imec-magazine-october-2018/silicon-photonic-interposers-for-400gb-s-and-beyond-optical-interconnectsSourced
That Ge photodetectors are offered by many commercial silicon photonics foundries; that APDs combining bandwidth, sensitivity and low noise at low voltage help S/N, that APDs generally fall short of Ge photodetectors in bandwidth, linearity and power handling and need stabilised bias and drift, and that raising gain while intrinsic responsivity stays low does not improve performanceShekhar et al., Nature Communications 15, 751 (2024), Reference 4 https://www.nature.com/articles/s41467-024-44750-0Sourced
That Ge has a large absorption coefficient at 1,300 to 1,550 nm and is compatible with silicon processing; that the Ge lattice constant is 4% larger than Si, which can produce a high density of threading dislocations, leading to high dark current and difficult integration; the simulation showing that lower threading dislocation density lowers dark current; and that tensile strain in Ge on Si arises from thermal expansion mismatch on cooling, depends on growth temperature, is expected to reach at most 0.34% when cooled from the Ge melting point (937 °C), and narrows the direct bandgap to extend detection to longer wavelengths (the L band)Yang et al., Microelectronics International 27(2), 113 (2010), Reference 5 https://bdt.semi.ac.cn/download/0.481743961058849.pdfSourced
That on 20 August 2024 the company announced sample shipments of a 200 Gbps pin-PD chip from 1 October; that the 200 Gbps EML chip has been in volume production since April 2024; the problem of few receive-side products meeting performance requirements; 800 Gbps with four chips and 1.6 Tbps with eight; and the back-illuminated, integrated convex-lens structure compatible with flip-chip mountingMitsubishi Electric news release (20 August 2024), Reference 6 https://www.mitsubishielectric.co.jp/ja/pr/2024/0820/Sourced
That OpenLight announced completion of GR-468 qualification for lasers, EAMs and PDs with InP integrated on silicon (as published by the company)OpenLight press release (24 March 2025), Reference 7 https://openlightphotonics.com/newsroom/openlight-achieves-successful-completion-of-telcordia-gr-468-qualification-for-silicon-photonics-componentsSourced
The check 1.24 ÷ 0.73 ≈ 1.70 µm; transit times and bandwidths for thicknesses of 1 / 0.5 / 0.3 / 0.2 µm (about 22 / 44 / 73 / 110 GHz); quantum efficiency 0.60 × 1.24 ÷ 1.31 ≈ 0.57, and the area ratio of 16 for the responsivity tolerance; the dark current multiplication at an activation energy of 0.66 eV (about 29 times at 70 °C and about 74 times at 85 °C); 0.34% strain as 3.4 µm per mm; and F ≈ M^0.7 giving about 5.0 at M = 10 and about 8.1 at M = 20Our calculation. Thicknesses, temperatures and gains are examples chosen by this article. Includes simplifications such as applying the saturation velocity across the whole depletion layer, a constant activation energy, and treating the responsivity as a value at 1.31 µmOur calculation
How far surface-illuminated detectors extend to faster generations; production values for dark current and dislocation density in each foundry's Ge photodetectors; and long-term reliability test results for Mitsubishi Electric's PDNot stated because no primary source could be confirmed as of this article's research (September 2026). This article's own judgementNot yet confirmed
Organising dark current into diffusion, generation-recombination and surface / sidewall leakage, and reading an activation energy close to the bandgap as a certificate of quality; reading the choice to refill sidewalls with crystal as a design philosophy that avoids interfaces; reading thermal-mismatch strain as a function, and the framing that bad and good effects coexist at one heterointerface; and how the figures are drawn (such as bringing light in sideways from the waveguide)Our own framing and commentary based on the published material. Not views expressed by the companies or institutionsCommentary
That Figs. 1 to 4, 6 and 7 are explanatory drawings rather than real cross-sections or measured data, and that the hero image and Fig. 5 are AI-generated imagesOur noteCommentary

Last updated 26 September 2026. Sources are limited to primary material (company technical material, technical reports and official announcements, official articles from research institutes, and peer-reviewed papers). Because the article includes numerical conversions and materials-design readings, those are marked as “Our calculation” or “Commentary” and kept separate from sourced fact. Mitsubishi Electric's values are evaluation results for a development chip, not transceiver performance. How surface-illuminated detectors extend to faster generations, production values for foundry Ge photodetectors, and long-term reliability test results are not stated here because no published primary source could be confirmed. All figures are explanatory concept graphics. Figs. 1 to 4, 6 and 7 are vector drawings, and the hero image and Fig. 5 are AI-generated images; none of them shows a real cross-section photograph, micrograph or physical product.

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